类金刚石薄膜的电子结构及组分分布研究
摘要：本论文采用直流磁控溅射，以Ar、Ar与CH4为工作气体溅射高纯石墨靶材制备了DLC薄膜。通过改变沉积基体的温度，溅射功率，沉积气压和工作气体等实验参数，以使得到的碳膜呈现出不同的表面形貌和性能；采用AES、FTIR、、Raman、等现代化测试手段，通过对薄膜宏观和微观结构的分析，研究了制备工艺对DLC薄膜电子化学键结构的影响,重点用俄歇电子能谱CKLL的dN(E)/E的形式来探索类金刚石薄膜sp2和 sp3的组分分布及其随膜厚的分布图。得到以下结果：
（1）俄歇电子能谱AES 中, CKLL 俄歇谱可以用作表面碳的形式的指纹鉴别,用CKLL 俄歇谱和其价带谱分析表征表明所制备氢化薄膜表面具有类金刚石4面体sp3价键结构。
（2）用俄歇电子能谱做薄膜的深度剖析，观察薄膜内层结构和sp2键与sp3键比率分布。发现薄膜表面和与基片的界面是富含sp2键层，中间是富含sp3键层。
关键词：DLC薄膜，俄歇电子能谱，电子结构，sp2键与sp3键比率
Study of the electronic structure and the range of the constituents of the diamond-like carbon films
Abstract:Diamond-like carbon films were prepared by DC reactive magnetron sputtering with Ar or Ar and CH4 an source gases,and purce graphite as a target.To get the films of differert microtopographies we changes the experimental parameters such as temperature of the depositional kinetosome,the sputtering power,the depositional air pressure and the gases.
We use the modernize tools such as AES,FTIR,Raman to study how the technics influencd the electron chemical bond of the film,and analyzed the macroscopy and microscopy structure of the films.The keystone of the thesis is that use the CKLL to explore the distribution of the sp2and sp3 and the figure of its changing go with the thick of the films.We get such results:
(1) In the AES,CKLL can work as the fingure of the format of the carbon form the teech outwards. So we use it to analyze the token and it shows that the structure of the hydrongenated film is the same as the tetrahedron of the DLC.
(2) The depth profile of the films made by Auger eletronic spectroscopy shows that there are much more sp2 hybrid bonds in the surface of the films and the place which between the surface and the interface of the substrates,and sp3 in the middle.
Key words: Diamond-like carbon films; AES; electronic structure; the ratio of sp2 and sp3
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